Surface morphology and X-ray photoelectron spectroscopy of BiFeO<sub>3</sub> thin films deposited on top of Ta<sub>2</sub>O<sub>5</sub>/Si layers

نویسندگان

چکیده

In this study a comparison of the topography BiFeO 3 (BFO) thin films deposited on tantalum pentoxide substrates different thicknesses is provided. The Ta 2 O 5 had roughness increasing with film thickness. relationship between but same composition quality growing bismuth ferrite estimated. For first time estimation BFO presented. difference in temperature expansion coefficients leads to intensive evaporation from surface during annealing. XPS analysis provided for asdeposited and annealed layers.

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ژورنال

عنوان ژورنال: E3S web of conferences

سال: 2021

ISSN: ['2555-0403', '2267-1242']

DOI: https://doi.org/10.1051/e3sconf/202129504009